The nano positioning Stage features a highly stable structural design and nanometer-level servo control capabilities. Integrated with intelligent software solutions, it significantly enhances overall equipment accuracy, fully demonstrating the high integration of mechanical, electrical, and software systems to meet the evolving demands of semiconductor equipment. With comprehensive path planning functionality and adaptive control algorithms, the platform delivers stable motion control and exceptional dynamic performance. It is suitable for high-end precision inspection instruments, enabling the completion of various refined detection tasks and aligning with the ongoing trend of industrial application upgrades.

l  Nano positioning stability ±2nm;

l  High velocity stability ±0.1%@100mm/s;

l  Customized modular design.