The TGV Drilling Air-flotation Stage is a specialized system that utilizes air-flotation technology for TGV (Through-Glass Via) processes. TGV drilling involves creating micro-scale through-holes in glass substrates to enable electrical connectivity and serves as a key technology in 3D integration. The air-flotation platform ensures stable and precise positioning and movement of the glass substrate during processing, thereby guaranteeing drilling accuracy and quality, and laying a solid foundation for subsequent TGV manufacturing steps.

l  High precision with 0.5μm repeat positioning accuracy;

l  High speed & acceleration, max. velocity 500mm/s;

l  Exceptional stability and reliability.