
Precision Motion Stage
The Perovskite Coating Air-flotation Stage is an air-flotation device designed for coating processes of perovskite materials (e.g., perovskite solar cells). By providing an air cushion between the substrate and the coating head, it eliminates friction, reduces vibration, and improves coating uniformity, thereby facilitating the formation of highly uniform and high-quality perovskite thin films. The platform utilizes compressed air to form a thin air cushion layer between the coating head and the substrate, enabling either the coating head or the substrate to levitate without direct physical contact, thus eradicating friction and vibration. It is particularly suitable for perovskite material preparation requiring high precision and high-quality thin films, such as the production of large-area perovskite solar cell.
l Air-floating Gantry Structure with Flexible Design;
l Dual Z-Axis with Nanometer-level Direct Drive;
l Uniform and Stable Coating Quality;
l High Precision, Stability, and Reliability.
Parameter of Product
Name | Specification |
Max.Speed | 500mm/s |
Max. Acceleration | 2G |
Positional Accuracy | ±2μm |
Repeatability Accuracy | ±1μm |
Application
• Slit coating machine • Production of Perovskite solar cells

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