The air-flotation precision transfer stage is a device that utilizes gas dynamics principles to achieve frictionless, high-precision motion through air flow support. It employs precisely controlled air layers to bear and guide the stage, where regulated compressed air forms an ultra-thin air film that completely isolates the platform from the base, dramatically reducing friction and enabling ultra-high positioning accuracy at the micron or even nanometer level. It is suitable for all precision manufacturing and inspection applications requiring high-precision movement and positioning.

l  High-precision positioning with nanometer-level repeatability;

l  Highly stable speed control: 500mm/s;

l  Non-contact handling to prevent particle contamination.