
Precision Motion Stage
The precision motion stage is a high-precision motion actuator that integrates core components such as linear motors, precision guides, and optical encoders.
Through closed-loop control, it processes feedback signals in real time to accurately adjust motor movement, achieving micron or nanometer-level positioning accuracy.
It is widely used in high-end industrial fields including semiconductor manufacturing, precision metrology, and optical processing.
l Highly consistent speed with minimal fluctuation;
l Wear-free operation, extended service life;
l Modular design supporting custom configurations.
Parameter of Product
Name | Specification |
Max. Speed | 500mm/s |
Max. Acceleration | 2G |
Positional Accuracy | ±2μm |
Repeatability Accuracy | ±1μm |
Application
• Semiconductor • Aerospace • Optical Fabrication • Ultra precise measurement

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