
Inspection Equipment
This equipment was developed specifically for detecting surface defects in fused silica hemispherical resonator oscillators. Based on high-precision automated optical inspection technology and equipped with high-definition imaging and intelligent image analysis algorithms, it can accurately identify various microscopic defects on the outer surface of the resonator, achieving automated inspection, intelligent judgment, and good product selection. The inspection accuracy reaches 10μm.
The equipment operates stably and is highly adaptable to different environments, meeting the high-standard appearance quality control requirements in the production process of precision inertial devices. It is a core inspection tool for mass production quality control of hemispherical resonator oscillators.

Product Features:
1. Precise Microscopic Defect Detection: Supports 10μm-level high-precision detection, effectively identifying various defects on the outer surface of hemispherical resonators, such as chipping, flaking, cracks, bubbles, and impurities.
2. Multi-Size Adaptability and Strong Compatibility: Detection size range 8x8x8~32x32x32 (mm), offering strong versatility.
3. Intelligent Optical Automatic Inspection: Automatically completes image acquisition, defect identification, data analysis, and product quality assessment.
4. Stable Adaptability to Mass Production Conditions: Stable structure, operable in ambient temperature environments, table load-bearing capacity compatible with standard precision manufacturing facilities, allowing for rapid integration into resonator precision production lines for quality control screening.
Parameter of Equipment:
Name | Specification |
Model | TY-JC-1030 |
Defect type | Chipping, flaking, cracks, bubbles, impurities |
Accuracy | 10~30μm |
Efficiency | 10min/pc |
Dimension | L*W*H:1560*1040*2000mm |
Weight | 800kg |


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