Overview

To detect the micron defects of the products, use the high-speed camera with a laser confocal system, and high-precision XY motion platform, and automatic loading and unloading with four-axis robot, which can inspection all the defects above 1um.

Microscope Reflective Confocal Laser Scanning – color DIC micro mirror/color DIC.

Advantage

1. Automatic detection, conveying, loading and unloading and judgment results;

2. High precision (detection precision is 1UM);

3. One click operation;

4. Automatically judge the result.