The Confocal Laser 3D Microscopes use a focused laser beam to scan samples point by point. The ability of confocal microscopy to eliminate out-of-focus light by employing a pinhole aperture results in excellent optical sections with high contrast and enables the high-resolution reconstruction of three-dimensional structures. It serves as an ideal tool for dimension measurement and defect analysis of micro/nano structures. Capable of high-speed defect capture, it integrates high-performance hardware with intelligent algorithms to rapidly scan large areas, achieve instant auto-focusing, and accurately identify and classify defects.

l  Ultra-high resolution for nano-scale defect visualization;

l  Non-destructive precision positioning ensuring sample integrity;

l   Instant auto-focusing with precise defect identification and classification.