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Precision Motion Components
Air Bearing Rotary Stage

Precision Motion Components

The Air Bearing Rotary Stage is an ultra-precision rotational platform based on air bearing technology, using compressed air as the lubricating medium. The pressurized air forms a thin film that averages out errors, creating a micrometer-scale air layer between the rotor and base to achieve frictionless, wear-free, and high-precision rotational motion. It serves as a critical device in advanced manufacturing, metrology, and scientific research.
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       The Air Bearing Rotary Stage is an ultra-precision rotational platform based on air bearing technology, using compressed air as the lubricating medium. The pressurized air forms a thin film that averages out errors, creating a micrometer-scale air layer between the rotor and base to achieve frictionless, wear-free, and high-precision rotational motion. It serves as a critical device in advanced manufacturing, metrology, and scientific research.


l  Continuous high acceleration with zero-friction silent operation;

l   Stable rotational accuracy and high repeatability;

l  High load capacity and strong carrying capability;

l  High rigidity with uniform and stable air-flotation force distribution.



Parameter of Product


Name

Specification

Diameter

φ50-300

Max.Speed

≤600RPM

Axial stiffness

30-410N/μm

Radial stiffness

16-230N/μm

Axial runout

0.1μm

Radial runout

0.1μm




 Application


• Semiconductor      • Optical Manufacturing     • Precision measurement     • Aerospace 



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