
Precision Motion Components
The Air Bearing Rotary Stage is an ultra-precision rotational platform based on air bearing technology, using compressed air as the lubricating medium. The pressurized air forms a thin film that averages out errors, creating a micrometer-scale air layer between the rotor and base to achieve frictionless, wear-free, and high-precision rotational motion. It serves as a critical device in advanced manufacturing, metrology, and scientific research.
l Continuous high acceleration with zero-friction silent operation;
l Stable rotational accuracy and high repeatability;
l High load capacity and strong carrying capability;
l High rigidity with uniform and stable air-flotation force distribution.
Parameter of Product
Name | Specification |
Diameter | φ50-300 |
Max.Speed | ≤600RPM |
Axial stiffness | 30-410N/μm |
Radial stiffness | 16-230N/μm |
Axial runout | 0.1μm |
Radial runout | 0.1μm |
Application
• Semiconductor • Optical Manufacturing • Precision measurement • Aerospace

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